Project Description
Investigate the following topics on your material - ZrO2.
A. Where is your material used in the semiconductor device? (e.g., Logic device, DRAM,NAND flash, emerging memories, and display) Discuss the advantages and characteristics of the material for the application. Discuss why the material is used than others.
B. How to deposit the material? Explain its deposition method during the device processing. Discuss why it is deposited by the deposition method.
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